JEOL JXA-8530F Electron Microprobe (EPMA)

The instrument is a dedicated field emission, wavelength dispersive electron microprobe (EPMA).

Quantitative elemental data can be obtained from most elements (Fluorine to Uranium) with detection limits of around 100ppm. The quantitation of:  B, C, N, and O is possible with suitable standards and sample material.

The field emission electron gun allows exceptional spacial resolution (100nM imaging) with high current at low kV beam currents.